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Journal: Materials, 2021
Volume: 14
Number: 1144

Article: Surface Analysis of TMCTS-Based SiOC(H) Low-k Dielectrics in Post-Etch Strip of ACL Hardmask
Authors: by Min Kyu Park, Wan Soo Song, Min Ho Kim and Sang Jeen Hong
Link: https://www.mdpi.com/1996-1944/14/5/1144

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