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10.3390/ma14237364
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Article

Refractive Index of Heavily Germanium-Doped Gallium Nitride Measured by Spectral Reflectometry and Ellipsometry

by
Dario Schiavon
1,2,*,
Robert Mroczyński
3,
Anna Kafar
1,
Grzegorz Kamler
1,
Iryna Levchenko
1,
Stephen Najda
2 and
Piotr Perlin
1,2
1
Polish Academy of Sciences, Institute of High Pressure Physics, Al. Sokołowska 29/37, 01-142 Warsaw, Poland
2
TOP-GAN sp.z o.o., Ul. Solec 24/90, 00-403 Warsaw, Poland
3
Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Ul. Koszykowa 75, 00-662 Warsaw, Poland
*
Author to whom correspondence should be addressed.
Materials 2021, 14(23), 7364; https://doi.org/10.3390/ma14237364
Submission received: 30 October 2021 / Revised: 19 November 2021 / Accepted: 26 November 2021 / Published: 30 November 2021
(This article belongs to the Special Issue Wide and Ultra-Wide Bandgap Semiconductor Materials for Power Devices)
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Abstract

Gallium nitride (GaN) doped with germanium at a level of 1020 cm−3 is proposed as a viable material for cladding layers in blue- and green-emitting laser diodes. Spectral reflectometry and ellipsometry are used to provide evidence of a reduced index of refraction in such layers. The refractive-index contrast to undoped GaN is about 0.990, which is comparable to undoped aluminium gallium nitride (AlGaN) with an aluminium composition of 6%. Germanium-doped GaN layers are lattice-matched to native GaN substrates; therefore, they introduce no strain, cracks, and wafer bowing. Their use, in place of strained AlGaN layers, will enable significant improvements to the production process yield.
Keywords: gallium nitride; germanium doping; index of refraction; electron plasma; reflectometry; ellipsometry gallium nitride; germanium doping; index of refraction; electron plasma; reflectometry; ellipsometry

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MDPI and ACS Style

Schiavon, D.; Mroczyński, R.; Kafar, A.; Kamler, G.; Levchenko, I.; Najda, S.; Perlin, P. Refractive Index of Heavily Germanium-Doped Gallium Nitride Measured by Spectral Reflectometry and Ellipsometry. Materials 2021, 14, 7364. https://doi.org/10.3390/ma14237364

AMA Style

Schiavon D, Mroczyński R, Kafar A, Kamler G, Levchenko I, Najda S, Perlin P. Refractive Index of Heavily Germanium-Doped Gallium Nitride Measured by Spectral Reflectometry and Ellipsometry. Materials. 2021; 14(23):7364. https://doi.org/10.3390/ma14237364

Chicago/Turabian Style

Schiavon, Dario, Robert Mroczyński, Anna Kafar, Grzegorz Kamler, Iryna Levchenko, Stephen Najda, and Piotr Perlin. 2021. "Refractive Index of Heavily Germanium-Doped Gallium Nitride Measured by Spectral Reflectometry and Ellipsometry" Materials 14, no. 23: 7364. https://doi.org/10.3390/ma14237364

APA Style

Schiavon, D., Mroczyński, R., Kafar, A., Kamler, G., Levchenko, I., Najda, S., & Perlin, P. (2021). Refractive Index of Heavily Germanium-Doped Gallium Nitride Measured by Spectral Reflectometry and Ellipsometry. Materials, 14(23), 7364. https://doi.org/10.3390/ma14237364

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