Order Article Reprints

Zhang Q, Chen M, Liu H, Zhao X, Qin X, Wang F, Tang Y, Yeoh KH, Chew K-H, Sun X. Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices. Materials. 2021; 14(21):6437. https://doi.org/10.3390/ma14216437

Zhang, Qiaozhen, Mingzhu Chen, Huiling Liu, Xiangyong Zhao, Xiaomei Qin, Feifei Wang, Yanxue Tang, Keat Hoe Yeoh, Khian-Hooi Chew, and Xiaojuan Sun. 2021. "Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices" Materials 14, no. 21: 6437. https://doi.org/10.3390/ma14216437

Zhang, Q., Chen, M., Liu, H., Zhao, X., Qin, X., Wang, F., Tang, Y., Yeoh, K. H., Chew, K.-H., & Sun, X. (2021). Deposition, Characterization, and Modeling of Scandium-Doped Aluminum Nitride Thin Film for Piezoelectric Devices. Materials, 14(21), 6437. https://doi.org/10.3390/ma14216437