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Journal: Materials, 2021
Volume: 14
Number: 5395
Article:
Investigations of Structural and Electrical Properties of ALD Films Formed with the Ozone Precursor
Authors:
by
Aleksandra Seweryn, Krystyna Lawniczak-Jablonska, Piotr Kuzmiuk, Sylwia Gieraltowska, Marek Godlewski and Robert Mroczynski
Link:
https://www.mdpi.com/1996-1944/14/18/5395
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