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Volume 14
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10.3390/ma14174925
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Article

Effects of Substrate Bias Voltage on Structure of Diamond-Like Carbon Films on AISI 316L Stainless Steel: A Molecular Dynamics Simulation Study

by
Ngoc-Tu Do
1,2,
Van-Hai Dinh
2,*,
Le Van Lich
2,*,
Hong-Hue Dang-Thi
2 and
Trong-Giang Nguyen
2
1
Department of Industrial Equipment & Tools, Faculty of Mechanical Engineering, Hanoi University of Industry, Hanoi 100000, Vietnam
2
School of Materials Science and Engineering, Hanoi University of Science and Technology, Hanoi 100000, Vietnam
*
Authors to whom correspondence should be addressed.
Materials 2021, 14(17), 4925; https://doi.org/10.3390/ma14174925
Submission received: 28 April 2021 / Revised: 1 June 2021 / Accepted: 10 June 2021 / Published: 30 August 2021
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Abstract

With the recent significant advances in micro- and nanoscale fabrication techniques, deposition of diamond-like carbon films on stainless steel substrates has been experimentally achieved. However, the underlying mechanism for the formation of film microstructures has remained elusive. In this study, the growth processes of diamond-like carbon films on AISI 316L substrate are studied via the molecular dynamics method. Effects of substrate bias voltage on the structure properties and sp3 hybridization ratio are investigated. A diamond-like carbon film with a compact structure and smooth surface is obtained at 120 V bias voltage. Looser structures with high surface roughness are observed in films deposited under bias voltages of 0 V or 300 V. In addition, sp3 fraction increases with increasing substrate bias voltage from 0 V to 120 V, while an opposite trend is obtained when the bias voltage is further increased from 120 V to 300 V. The highest magnitude of sp3 fraction was about 48.5% at 120 V bias voltage. The dependence of sp3 fraction in carbon films on the substrate bias voltage achieves a high consistency within the experiment results. The mechanism for the dependence of diamond-like carbon structures on the substrate bias voltage is discussed as well.
Keywords: diamond-like carbon; substrate bias voltage; AISI 316L stainless steel; deposition process; molecular dynamics simulation diamond-like carbon; substrate bias voltage; AISI 316L stainless steel; deposition process; molecular dynamics simulation

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MDPI and ACS Style

Do, N.-T.; Dinh, V.-H.; Lich, L.V.; Dang-Thi, H.-H.; Nguyen, T.-G. Effects of Substrate Bias Voltage on Structure of Diamond-Like Carbon Films on AISI 316L Stainless Steel: A Molecular Dynamics Simulation Study. Materials 2021, 14, 4925. https://doi.org/10.3390/ma14174925

AMA Style

Do N-T, Dinh V-H, Lich LV, Dang-Thi H-H, Nguyen T-G. Effects of Substrate Bias Voltage on Structure of Diamond-Like Carbon Films on AISI 316L Stainless Steel: A Molecular Dynamics Simulation Study. Materials. 2021; 14(17):4925. https://doi.org/10.3390/ma14174925

Chicago/Turabian Style

Do, Ngoc-Tu, Van-Hai Dinh, Le Van Lich, Hong-Hue Dang-Thi, and Trong-Giang Nguyen. 2021. "Effects of Substrate Bias Voltage on Structure of Diamond-Like Carbon Films on AISI 316L Stainless Steel: A Molecular Dynamics Simulation Study" Materials 14, no. 17: 4925. https://doi.org/10.3390/ma14174925

APA Style

Do, N.-T., Dinh, V.-H., Lich, L. V., Dang-Thi, H.-H., & Nguyen, T.-G. (2021). Effects of Substrate Bias Voltage on Structure of Diamond-Like Carbon Films on AISI 316L Stainless Steel: A Molecular Dynamics Simulation Study. Materials, 14(17), 4925. https://doi.org/10.3390/ma14174925

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