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Journal: Materials, 2021
Volume: 14
Number: 4445
4445
Article: Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data
Authors: by Yu-Pu Yang, Te-Yun Lu, Hsiao-Han Lo, Wei-Lun Chen, Peter J. Wang, Walter Lai, Yiin-Kuen Fuh and Tomi T. Li
Link: https://www.mdpi.com/1996-1944/14/16/4445

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