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Micromachining of Invar with 784 Beams Using 1.3 ps Laser Source at 515 nm

1
HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic
2
Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 115 19 Prague, Czech Republic
3
Meopta-optika, s.r.o., Kabelikova 1, 750 02 Prerov, Czech Republic
*
Author to whom correspondence should be addressed.
Materials 2020, 13(13), 2962; https://doi.org/10.3390/ma13132962
Received: 17 June 2020 / Revised: 30 June 2020 / Accepted: 1 July 2020 / Published: 2 July 2020
(This article belongs to the Special Issue Advanced Pulse Laser Machining Technology)
To fulfil the requirements for high-resolution organic light-emitting diode (OLED) displays, precise and high-quality micrometer-scale patterns have to be fabricated inside metal shadow masks. Invar has been selected for this application due to its unique properties, especially a low coefficient of thermal expansion. In this study, a novel cost-efficient method of multi-beam micromachining of invar will be introduced. The combination of a Meopta beam splitting, focusing and monitoring module with a galvanometer scanner and HiLASE high-energy pulse laser system emitting ultrashort pulses at 515 nm allows drilling and cutting of invar foil with 784 beams at once with high precision and almost no thermal effects and heat-affected zone, thus significantly improving the throughput and efficiency. View Full-Text
Keywords: multi-beam micromachining; beam splitting; invar; shadow masks; OLED multi-beam micromachining; beam splitting; invar; shadow masks; OLED
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MDPI and ACS Style

Hauschwitz, P.; Stoklasa, B.; Kuchařík, J.; Turčičová, H.; Písařík, M.; Brajer, J.; Rostohar, D.; Mocek, T.; Duda, M.; Lucianetti, A. Micromachining of Invar with 784 Beams Using 1.3 ps Laser Source at 515 nm. Materials 2020, 13, 2962. https://doi.org/10.3390/ma13132962

AMA Style

Hauschwitz P, Stoklasa B, Kuchařík J, Turčičová H, Písařík M, Brajer J, Rostohar D, Mocek T, Duda M, Lucianetti A. Micromachining of Invar with 784 Beams Using 1.3 ps Laser Source at 515 nm. Materials. 2020; 13(13):2962. https://doi.org/10.3390/ma13132962

Chicago/Turabian Style

Hauschwitz, Petr, Bohumil Stoklasa, Jiří Kuchařík, Hana Turčičová, Michael Písařík, Jan Brajer, Danijela Rostohar, Tomáš Mocek, Martin Duda, and Antonio Lucianetti. 2020. "Micromachining of Invar with 784 Beams Using 1.3 ps Laser Source at 515 nm" Materials 13, no. 13: 2962. https://doi.org/10.3390/ma13132962

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