In this paper, based on coupled hetero-cavities, multiple Fano resonances are produced and tuned in a plasmonic metal-insulator-metal (MIM) system. The structure comprises a rectangular cavity, a side-coupled waveguide, and an upper-coupled circular cavity with a metal-strip core, used to modulate Fano resonances. Three Fano resonances can be realized, which originate from interference of the cavity modes between the rectangular cavity and the metal-strip-core circular cavity. Due to the different cavity-cavity coupling mechanisms, the three Fano resonances can be divided into two groups, and each group of Fano resonances can be well tuned independently by changing the different cavity parameters, which can allow great flexibility to control multiple Fano resonances in practice. Furthermore, through carefully adjusting the direction angle of the metal-strip core in the circular cavity, the position and lineshape of the Fano resonances can be easily tuned. Notably, reversal asymmetry takes place for one of the Fano resonances. The influence of the direction angle on the figure of merit (FOM) value is also investigated. A maximum FOM of 3436 is obtained. The proposed structure has high transmission, sharp Fano lineshape, and high sensitivity to change in the background refractive index. This research provides effective guidance to tune multiple Fano resonances, which has important applications in nanosensors, filters, modulators, and other related plasmonic devices.
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