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Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films

1
School of Physical Engineering, Zhengzhou University, Zhengzhou 450052, China
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School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang 471023, China
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School of Physical and Engineering, Henan University of Science and Technology, Luoyang 471023, China
4
Collaborative Innovation Center of Nonferrous Metals, Henan University of Science and Technology, Luoyang 471003, China
*
Author to whom correspondence should be addressed.
Materials 2018, 11(9), 1634; https://doi.org/10.3390/ma11091634
Received: 2 August 2018 / Revised: 26 August 2018 / Accepted: 29 August 2018 / Published: 6 September 2018
In this paper, molybdenum (Mo) thin films are deposited on soda-lime glass (SLG) substrates by direct current magnetron sputtering and heated in three different modes at different temperatures, including substrate heating, annealing treatment, and both substrate heating and annealing treatment. The effects of heating temperature and heating mode on the structures, morphology, optical and electrical properties of Mo thin films were systematically investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM), atomic force microscope (AFM) and UV-visible spectrophotometer (UV-vis spectra). It is shown that as the substrate and annealing temperature increase, the crystallinity of Mo thin films is improved, and the grain sizes become bigger. Especially in the mode of both substrate heating and annealing treatment at higher temperature, the obtained Mo thin films show higher crystallinity and conductivity. Moreover, with the increase of substrate and annealing temperature in different heating modes, both the surface compactness of Mo films and the optical reflectance increase correspondingly. Furthermore, the Mo film, prepared at the substrate heating temperature of 400 °C and annealed at 400 °C, showed excellent comprehensive performance, and the resistivity is as low as 1.36 × 10−5 Ω·cm. Using this optimized Mo thin film as an electrode, copper indium gallium selenium (CIGS) solar cells have a maximum photo-conversion efficiency of 12.8%. View Full-Text
Keywords: CIGS thin film solar cells; Mo thin films; magnetron sputtering; heating mode; temperature CIGS thin film solar cells; Mo thin films; magnetron sputtering; heating mode; temperature
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MDPI and ACS Style

Zhao, H.; Xie, J.; Mao, A.; Wang, A.; Chen, Y.; Liang, T.; Ma, D. Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films. Materials 2018, 11, 1634.

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