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Open AccessArticle

Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

1
Institute of Electro-Optical and Materials Science, National Formosa University, Yunlin 63201, Taiwan
2
Additive Manufacturing and Laser Application, Industrial Technology Research Institute, Tainan 73445, Taiwan
3
Institute of Microelectronics, National Cheng Kung University, Tainan 70101, Taiwan
*
Author to whom correspondence should be addressed.
Materials 2017, 10(7), 797; https://doi.org/10.3390/ma10070797
Received: 29 May 2017 / Revised: 7 July 2017 / Accepted: 9 July 2017 / Published: 14 July 2017
(This article belongs to the Special Issue Selected Papers from IEEE ICASI 2017)
Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (AgZn) and the formation of the Ag aggregations (Ag0) in the ZnO matrix were investigated from XRD, Raman scattering, and XPS measurements. The Ag-ZnO co-sputtered film behaving like a p-type conduction was achievable after annealing at 350 °C under air ambient for 1 h. View Full-Text
Keywords: Ag-ZnO co-sputtered film; radio frequency magnetron co-sputtered system; Ag acceptors; Ag aggregations; p-type conduction Ag-ZnO co-sputtered film; radio frequency magnetron co-sputtered system; Ag acceptors; Ag aggregations; p-type conduction
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MDPI and ACS Style

Liu, F.-C.; Li, J.-Y.; Chen, T.-H.; Chang, C.-H.; Lee, C.-T.; Hsiao, W.-H.; Liu, D.-S. Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System. Materials 2017, 10, 797.

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