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Journal: Energies, 2024
Volume: 17
Number: 6178
Article:
A Novel Approach of −80 °C Cascade Refrigeration System Using Non-Flammable Quaternary Refrigerants for Semiconductor Process Applications
Authors:
by
Su-Been Lee, Chang-Hyo Son and Joon-Hyuk Lee
Link:
https://www.mdpi.com/1996-1073/17/23/6178
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