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Journal: Energies, 2021
Volume: 14
Number: 7462
Article:
Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation
Authors:
by
Mariusz Jankowski, Piotr Zając, Piotr Amrozik, Michał Szermer, Cezary Maj, Grzegorz Jabłoński and Jacek Nazdrowicz
Link:
https://www.mdpi.com/1996-1073/14/22/7462
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