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Journal: Sensors, 2009
Volume: 9
Number: 2470

Article: Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH
Authors: by Rong Lu, Yanhong Wu, Haitao Cheng, Heng Yang, Xinxin Li and Yuelin Wang
Link: https://www.mdpi.com/1424-8220/9/4/2470

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