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Journal: Sensors, 2009
Volume: 9
Number: 2470
Article:
Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH
Authors:
by
Rong Lu, Yanhong Wu, Haitao Cheng, Heng Yang, Xinxin Li and Yuelin Wang
Link:
https://www.mdpi.com/1424-8220/9/4/2470
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