Lu, R.; Wu, Y.; Cheng, H.; Yang, H.; Li, X.; Wang, Y.
Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH. Sensors 2009, 9, 2470-2477.
https://doi.org/10.3390/s90402470
AMA Style
Lu R, Wu Y, Cheng H, Yang H, Li X, Wang Y.
Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH. Sensors. 2009; 9(4):2470-2477.
https://doi.org/10.3390/s90402470
Chicago/Turabian Style
Lu, Rong, Yanhong Wu, Haitao Cheng, Heng Yang, Xinxin Li, and Yuelin Wang.
2009. "Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH" Sensors 9, no. 4: 2470-2477.
https://doi.org/10.3390/s90402470
APA Style
Lu, R., Wu, Y., Cheng, H., Yang, H., Li, X., & Wang, Y.
(2009). Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH. Sensors, 9(4), 2470-2477.
https://doi.org/10.3390/s90402470