Effect of Electrical Contact on the Contact Residual Stress of a Microrelay Switch
Abstract
:1. Introduction
2. Theoretical Analysis
3. Finite Element Model
4. Results and Discussion
5. Conclusions
- The residual stress is affected significantly by the contact gap and the film thickness. The residual stress increases with the increase of the contact gap and decreases as the film thickness increases.
- A smaller contact gap results in a larger microcantilever-electrode contact force. The contact location of the microcantilever beam and the electrode is varied with the size of the contact gap. The contact location is moved toward the free end of microcantilever beam as the contact gap increases.
- The residual stress increases as the number of switching cycles increases. A larger residual stress remains in the microcantilever beam can decrease the lifecycle of microrelay.
- The plastic deformation at the microcantilever tip increases as the number of switching cycles increases. This plastic deformation at the microcantilever tip decreases the gap distance between the microcantilever beam and the electrode, and changes the microcantilever-electrode contact location as well.
References and Notes
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Permalloy | Copper | Silicon | |
---|---|---|---|
Young's modulus (GPa) | 255 | 120 | 73 |
Poission's ratio | 0.3 | 0.35 | 0.26 |
Yielding strength (MPa) | 280 [8] | 127 | – |
Ultimate strength (MPa) | 568 [8] | 435 | 180 |
Coefficient of Expansion (°C)−1 | 13.347 E-6 | 16.483 E-6 | 3.0 E-6 |
Conductivity (W / m·K) | 49.99 | 386.52 | 71 |
Conductance (1 / Ω·m) | 6.249 E+6 | 58.06 E+6 | 60 E+6 |
Density (kg / m3) | 9200 | 8935 | 3100 |
Specific Heat (J / kg·K) | 419.99 | 383.62 | 710 |
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Chen, Y.-C.; Tsai, H.-H.; Lu, W.-H.; Chen, L.-W. Effect of Electrical Contact on the Contact Residual Stress of a Microrelay Switch. Sensors 2007, 7, 2997-3011. https://doi.org/10.3390/s7112997
Chen Y-C, Tsai H-H, Lu W-H, Chen L-W. Effect of Electrical Contact on the Contact Residual Stress of a Microrelay Switch. Sensors. 2007; 7(11):2997-3011. https://doi.org/10.3390/s7112997
Chicago/Turabian StyleChen, Yung-Chuan, Hsun-Heng Tsai, Wei-Hua Lu, and Li-Wen Chen. 2007. "Effect of Electrical Contact on the Contact Residual Stress of a Microrelay Switch" Sensors 7, no. 11: 2997-3011. https://doi.org/10.3390/s7112997
APA StyleChen, Y.-C., Tsai, H.-H., Lu, W.-H., & Chen, L.-W. (2007). Effect of Electrical Contact on the Contact Residual Stress of a Microrelay Switch. Sensors, 7(11), 2997-3011. https://doi.org/10.3390/s7112997