Spannhake, J.;                     Schulz, O.;                     Helwig, A.;                     Krenkow, A.;                     Müller, G.;                     Doll, T.    
        High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials. Sensors 2006, 6, 405-419.
    https://doi.org/10.3390/s6040405
    AMA Style
    
                                Spannhake J,                                 Schulz O,                                 Helwig A,                                 Krenkow A,                                 Müller G,                                 Doll T.        
                High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials. Sensors. 2006; 6(4):405-419.
        https://doi.org/10.3390/s6040405
    
    Chicago/Turabian Style
    
                                Spannhake, Jan,                                 Olaf Schulz,                                 Andreas Helwig,                                 Angelika Krenkow,                                 Gerhard Müller,                                 and Theodor Doll.        
                2006. "High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials" Sensors 6, no. 4: 405-419.
        https://doi.org/10.3390/s6040405
    
    APA Style
    
                                Spannhake, J.,                                 Schulz, O.,                                 Helwig, A.,                                 Krenkow, A.,                                 Müller, G.,                                 & Doll, T.        
        
        (2006). High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials. Sensors, 6(4), 405-419.
        https://doi.org/10.3390/s6040405