The large-angle spectral confocal optical system comprises two main subsystems: a dispersive objective lens and a spectrometer. Optical signals are routed and coupled between the subsystems using Y-type fiber optic couplers. The dispersive objective lens serves as a crucial element in spectral confocal sensors, determining both the measurement range and the angular measurement capability of the sensor. During the design process, a balance must be struck between enlarging the measurement range and increasing the NA. An excessively large measurement range reduces light energy utilization efficiency and imaging signal-to-noise ratio. Increasing the NA can improve light energy utilization efficiency and the signal-to-noise ratio to a certain extent, but it also complicates aberration correction. The spectrometer establishes a mapping between the focused wavelength and the corresponding position, and its performance directly governs the resolution of the spectral confocal sensor. This study adopts a C-T reflective configuration and employs a 14 μm × 200 μm line-scan detector. To achieve high spectral resolution, aberration correction is required to minimize the influence of astigmatism on light energy utilization efficiency and system resolution.
3.1. Design of the Dispersive Objective Lens
During the design process, evaluation of the dispersive objective lens emphasizes spot size and beam focusing, while image sharpness, distortion, and astigmatism are disregarded; consequently, spherical aberration is identified as the primary aberration requiring correction. On-axis monochromatic spherical aberration enlarges the spot size at the image plane, broadens the spectral profile, and degrades the axial resolution of the sensor, thus requiring precise correction. To mitigate this effect, the lens can first be divided into multiple elements. By evenly distributing the optical power among four to five elements, the spherical aberration can be reduced to approximately 10–15% of that of a single lens, while maintaining the original NA and total optical power of the system [
35]. Furthermore, the separated elements can be combined into a cemented doublet to further suppress spherical aberration.
Zemax optical design software was used to perform simulation and optimization of the dispersive objective lenses. Since the dispersive objective lens in a spectral confocal system must intentionally preserve and precisely control axial chromatic aberration to establish a one-to-one correspondence between wavelength and axial positioning, conventional imaging performance metrics, such as modulation transfer function (MTF) and wavefront aberration, are not suitable as primary optimization criteria. Therefore, the root-mean-square (RMS) spot radius was selected as the main merit function to evaluate monochromatic aberration control at each working wavelength.
A multi-configuration optimization was performed over the visible wavelength range of 430–700 nm, with seven reference wavelengths selected. Except for the second wavelength, the reference wavelengths were chosen at 50 nm intervals, and the principal wavelength was set at 550 nm. The object-side numerical aperture was fixed at 0.22. During the optimization, the axial distances from the last surface of the dispersive objective lens to the best focal planes for each reference wavelength were treated as multi-configuration design variables, in order to maintain a linear relationship between wavelength and focal shift. At the same time, the system numerical aperture was constrained to limit the maximum allowable object angle. Lens curvatures, thicknesses, and inter-lens air gaps were used as optimization variables. The optimization performance was evaluated by the RMS spot radius at the best focal plane corresponding to each reference wavelength, so that the RMS spot radius at each focal plane remained below the corresponding Airy disk radius. After the preliminary optimization, a Hammer optimization was applied to refine the structural material parameters. In combination with the distributions of refractive indices and Abbe numbers, certain lens materials were replaced or reconfigured to improve aberration balance and chromatic compensation under multi-wavelength conditions. The optimized dispersive objective lens structure is shown in
Figure 4, consisting of six singlet lenses and one cemented doublet, all with spherical surfaces. The image-side numerical aperture of the system is 0.645, the working distance exceeds 15 mm, the axial dispersion range reaches 1.5 mm, and the total system length is 139.6 mm.
The spot diagrams and spherical aberration curves at wavelengths of 430, 450, 500, 550, 600, 650, and 700 nm are shown in
Figure 5 and
Figure 6, respectively. At all wavelengths, the RMS spot radius at the focal plane remains below the corresponding Airy disk radius. The peak spherical aberrations at these wavelengths are 1.207, 0.780, −0.618, −0.570, −0.468, 0.378, and 0.732 μm, respectively, indicating well-controlled spherical aberration and excellent imaging performance across the visible spectrum.
The spectral confocal sensor ultimately yields a unique relation between the measured position and the peak wavelength. For the dispersive objective lens, improved proportionality between axial dispersion and wavelength contributes to higher measurement accuracy. The proportional relationship of axial dispersion with wavelength was obtained via least-squares fitting, as shown in
Figure 7. The black dots represent discrete chromatic focal shift (CFS) data exported from Zemax, which directly characterize the axial dispersion range of the dispersive objective lens. As can be observed from the CFS distribution, the total axial dispersion exceeds 1.5 mm over the 430–700 nm wavelength range, satisfying the design requirement of the spectral confocal system. These discrete CFS data serve as the raw and initial dataset for both linear and polynomial fittings. The red solid line denotes the linear fit to these data points, which exhibits an axial dispersion of 1.5 mm over the 430–700 nm wavelength range (
= 0.97383). Deviations from this linear fit are most pronounced at the short- and long-wavelength ends and near the central wavelength, primarily due to the dispersion characteristics of the glass materials. At the spectrum edges, the refractive index varies more significantly with wavelength, making it challenging to maintain a highly linear axial dispersion across the full wavelength range. The blue curve in
Figure 7 represents the polynomial fit. To obtain this curve, a fifth-order polynomial fitting method is employed, which passes exactly through all black data points, yielding a coefficient of determination
= 1. Specifically, the resulting relationship can be expressed in the form of the following fifth-order polynomial equation:
where
represents the position of the relative focal point, and
represents the wavelength. The polynomial curve effectively characterizes the mapping between wavelengths and their respective focal positions. However, variations in slope across the spectrum result in minor changes to the resolution performance of the dispersive objective lens.
In this context, the axial dispersion nonlinearity ( = 0.97383) indicates that the sensitivity of axial position to wavelength is not uniform across the entire spectral range. As a result, the same wavelength measurement error can produce different magnitudes of axial position error at different wavelengths, leading to a non-uniform axial resolution across the measurement range, particularly near the spectrum edges. In practice, this effect can be mitigated through experimental calibration to establish the true wavelength–axial position mapping, combined with signal processing techniques such as spectral filtering and peak wavelength estimation; with appropriate calibration and post-processing, the axial dispersion nonlinearity does not constitute a major limitation for depth measurement accuracy.
Since the spectral information received by the detector is reflected from the measured object, passes through the dispersive objective lens a second time, and is finally delivered to the spectrometer via the Y-type fiber optic coupler. Therefore, it is necessary to analyze the propagation of light through the dispersive objective lens a second time to determine whether all rays carrying information from the measured object can enter the optical fiber. A mirror is placed at the focal plane corresponding to a specific wavelength to simulate the target object’s surface. The beam traverses the dispersive objective lens, reflects off the mirror, and returns through the dispersive objective lens to form an image at the position of the light source.
Figure 8 illustrates the spot distributions on the focal planes. (a) shows a matrix of spot diagrams of all working wavelengths evaluated at the focal plane corresponding to each reference wavelength. It can be observed that when the reflector is positioned at the optimal focal plane of a given reference wavelength, only that wavelength exhibits the minimum spot size, which is smaller than the corresponding Airy disk radius. All other wavelengths are defocused to varying degrees, and their spot sizes increase progressively as the wavelength deviates further from the focal wavelength. (b) presents a representative case in which the reflector is positioned at the focal plane corresponding to 450 nm. Under this condition, the RMS spot radius at 450 nm is 0.326 μm, which is smaller than the corresponding Airy disk radius of 1.158 μm, indicating diffraction-limited focusing at the design wavelength. At wavelengths of 430, 500, 550, 600, 650, and 700 nm, the spot diagrams are defocused, showing large and diffuse spots. At the wavelength of maximum deviation (700 nm), the RMS spot radius increases to 3290.53 μm. Since the optical fiber has a diameter of 50 μm, light at the focal wavelength and nearby wavelengths can all enter the fiber. As the wavelength deviates further from the focal wavelength, the optical energy coupled into the fiber decreases sharply. Therefore, the designed dispersive objective lens exhibits pronounced axial dispersion characteristics, enabling the spatial separation of different wavelengths.
An ideal plane mirror corresponds to strict normal incidence and coaxial retroreflection. However, in practical droplet measurements, when the local surface tilt is within the allowable object angle set by the image-side NA of the dispersive objective lens, a portion of the reflected light can still be collected and coupled back into the fiber. In this case, spectral confocal sensor primarily relies on the spectral peak wavelength of the reflected light rather than its intensity. Therefore, surface tilt mainly affects the signal amplitude, with relatively limited impact on the accuracy of axial position demodulation. By combining multi-point surface sampling with global surface fitting, the influence of local signal attenuation on the reconstructed droplet profile and curvature inversion can be effectively suppressed. The plane mirror model and measurement strategy adopted in this work primarily apply to droplet surface regions within the image-side NA allowable range, where their validity is ensured by both the system design and the spectral confocal sensor mechanism. When the droplet surface tilt further increases beyond the maximum allowable object angle allowed by the system’s image-side NA, the reflected light can no longer be efficiently returned to the sensor. For such situations, previous studies have shown that introducing a collimating lens in the return path along with a retroreflector can redirect the reflected light back into the sensor, enabling oblique-incidence spectral confocal measurements. This method can be regarded as a compensation and extension strategy for angles exceeding the image-side NA allowable range [
36].
3.2. Design of the Spectrometer
The spectrometer primarily comprises the collimating mirror, the diffraction grating, and the focusing mirror. During design, tangential aberrations are primarily considered to achieve high spectral resolution, while the sagittal direction is sometimes assigned zero weight to further optimize image quality along the tangential plane. In off-axis reflective systems, astigmatism is a primary aberration. Although astigmatism does not directly affect spectral resolution, in C-T type spectrometers, the miniaturization of the device partially limits the optical energy throughput of the spectrometer, and spectral line broadening caused by astigmatism further increases energy loss.
Table 3 lists the fundamental parameters of the C-T type spectrometer under astigmatism-free conditions.
The optical path of the C-T type spectrometer was optimized using Zemax. Variables included the distance from the focusing mirror to the image plane, the tilt angle of the image plane, the tilt angle and decenter of the collimating mirror, the tilt angle of the grating, and the tilt angle and decenter of the focusing mirror. The RMS spot radius along the slit-width direction (Y-direction) was optimized. The default merit function was set to the Y-direction RMS spot radius, with a weight ratio of 1:0 between the tangential and sagittal directions. The optimized spectrometer optical path is shown in
Figure 9.
The C-T type spectrometer uses the spot diagram as the evaluation criterion. The optical fiber collects light reflected from the measured surface and delivers it to the detector, with the object height set according to the fiber core diameter of 50 µm.
Figure 10 shows the spot diagram of the spectrometer under astigmatism-free conditions. According to the Rayleigh criterion, two points are considered resolvable when the center of one point’s diffraction pattern coincides with the first dark ring of the other. In general, spots in the spot diagram are considered resolvable when their overlap does not exceed one-half. Analysis of the spot diagram reveals noticeable overlap at the central wavelength; however, at a wavelength of 550 nm, the overlap along the Y-direction is less than 30%. At a wavelength of 700 nm, the overall spectral broadening slightly surpasses 200 μm, but the core region remains within this range. Consequently, the system’s broadening in the X-direction is effectively maintained within the single pixel (200 μm). These results demonstrate that the spectrometer, under astigmatism-free conditions, can resolve two wavelengths separated by 0.54 nm, thereby satisfying the design resolution requirement. Furthermore, astigmatism is effectively controlled across the entire wavelength range.
Figure 11 shows the variation in the Y-direction RMS spot radius across the wavelength range. It can be observed that across the 400–700 nm spectral range. The Y-direction RMS spot radius consistently remains below the single-pixel size of 14 µm, demonstrating the excellent imaging performance of the spectrometer.
The system requires the spectrometer detector to capture the maximum possible light intensity while maintaining spectral resolution; therefore, it is essential to control the beam dimensions in the non-dispersive direction. The analysis of the encircled energy for an X-direction radius of 100 µm is presented, and the average encircled energy distribution is shown in
Figure 12.
In summary, the designed C-T type spectrometer, under astigmatism-free conditions, achieves high spectral resolution and excellent imaging performance across the working wavelength range. The system effectively suppresses astigmatism-induced energy loss while maintaining spectral resolution, with an average encircled energy exceeding 80%, thereby meeting the performance requirements of compact spectrometers.