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Journal: Sensors, 2025
Volume: 25
Number: 4074
4074
Article: Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance
Authors: by Esmaeil Afshari, Samer Houri, Rik Verplancke, Veronique Rochus, Maarten Cauwe, Pieter Gijsenbergh and Maaike Op de Beeck
Link: https://www.mdpi.com/1424-8220/25/13/4074

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