Afshari, E.; Houri, S.; Verplancke, R.; Rochus, V.; Cauwe, M.; Gijsenbergh, P.; Op de Beeck, M.
Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance. Sensors 2025, 25, 4074.
https://doi.org/10.3390/s25134074
AMA Style
Afshari E, Houri S, Verplancke R, Rochus V, Cauwe M, Gijsenbergh P, Op de Beeck M.
Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance. Sensors. 2025; 25(13):4074.
https://doi.org/10.3390/s25134074
Chicago/Turabian Style
Afshari, Esmaeil, Samer Houri, Rik Verplancke, Veronique Rochus, Maarten Cauwe, Pieter Gijsenbergh, and Maaike Op de Beeck.
2025. "Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance" Sensors 25, no. 13: 4074.
https://doi.org/10.3390/s25134074
APA Style
Afshari, E., Houri, S., Verplancke, R., Rochus, V., Cauwe, M., Gijsenbergh, P., & Op de Beeck, M.
(2025). Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance. Sensors, 25(13), 4074.
https://doi.org/10.3390/s25134074
