Article Versions Notes

Hsueh J-C, Kines M, Tantawy YA, Smith DS, McCue J, Dupaix B, Patel VJ, Khalil W. In Situ Time-Based Sensor for Process Identification Using Amplified Back-End-of-Line Resistance and Capacitance. Sensors. 2025; 25(11):3255. https://doi.org/10.3390/s25113255

Hsueh, Jen-Chieh, Mike Kines, Yousri Ahmed Tantawy, Dale Shane Smith, Jamin McCue, Brian Dupaix, Vipul J. Patel, and Waleed Khalil. 2025. "In Situ Time-Based Sensor for Process Identification Using Amplified Back-End-of-Line Resistance and Capacitance" Sensors 25, no. 11: 3255. https://doi.org/10.3390/s25113255

Hsueh, J.-C., Kines, M., Tantawy, Y. A., Smith, D. S., McCue, J., Dupaix, B., Patel, V. J., & Khalil, W. (2025). In Situ Time-Based Sensor for Process Identification Using Amplified Back-End-of-Line Resistance and Capacitance. Sensors, 25(11), 3255. https://doi.org/10.3390/s25113255