Park, H.; Kim, J.; Cho, S.; Kim, K.; Jang, S.; Choi, Y.; Lee, H.
Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot Arm Transfer Capability for Two-Dimensional In Situ Processing Plasma Diagnosis. Sensors 2024, 24, 1786.
https://doi.org/10.3390/s24061786
AMA Style
Park H, Kim J, Cho S, Kim K, Jang S, Choi Y, Lee H.
Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot Arm Transfer Capability for Two-Dimensional In Situ Processing Plasma Diagnosis. Sensors. 2024; 24(6):1786.
https://doi.org/10.3390/s24061786
Chicago/Turabian Style
Park, Haewook, Juhyun Kim, Sungwon Cho, Kyunghyun Kim, Sungho Jang, Younsok Choi, and Hohyun Lee.
2024. "Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot Arm Transfer Capability for Two-Dimensional In Situ Processing Plasma Diagnosis" Sensors 24, no. 6: 1786.
https://doi.org/10.3390/s24061786
APA Style
Park, H., Kim, J., Cho, S., Kim, K., Jang, S., Choi, Y., & Lee, H.
(2024). Development of Wafer-Type Plasma Monitoring Sensor with Automated Robot Arm Transfer Capability for Two-Dimensional In Situ Processing Plasma Diagnosis. Sensors, 24(6), 1786.
https://doi.org/10.3390/s24061786