Chen, S.; Feng, L.; Guo, S.; Ji, Y.; Zeng, S.; Peng, X.; Xu, Y.; Hu, T.; Wu, Z.; Wang, S.
A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors 2023, 23, 1276.
https://doi.org/10.3390/s23031276
AMA Style
Chen S, Feng L, Guo S, Ji Y, Zeng S, Peng X, Xu Y, Hu T, Wu Z, Wang S.
A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors. 2023; 23(3):1276.
https://doi.org/10.3390/s23031276
Chicago/Turabian Style
Chen, Shuo, Liuhaodong Feng, Song Guo, Yucheng Ji, Shuwen Zeng, Xinlin Peng, Yang Xu, Tianbao Hu, Zhenyu Wu, and Shinan Wang.
2023. "A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy" Sensors 23, no. 3: 1276.
https://doi.org/10.3390/s23031276
APA Style
Chen, S., Feng, L., Guo, S., Ji, Y., Zeng, S., Peng, X., Xu, Y., Hu, T., Wu, Z., & Wang, S.
(2023). A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy. Sensors, 23(3), 1276.
https://doi.org/10.3390/s23031276