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Journal: Sensors, 2023
Volume: 23
Number: 5563
Article:
Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD
Authors:
by
Yonggyun Park, Pengzhan Liu, Seunghwan Lee, Jinill Cho, Eric Joo, Hyeong-U Kim and Taesung Kim
Link:
https://www.mdpi.com/1424-8220/23/12/5563
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