Tang, B.; Shi, Y.; Li, J.; Tang, J.; Feng, Q.
Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors. Sensors 2022, 22, 6778.
https://doi.org/10.3390/s22186778
AMA Style
Tang B, Shi Y, Li J, Tang J, Feng Q.
Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors. Sensors. 2022; 22(18):6778.
https://doi.org/10.3390/s22186778
Chicago/Turabian Style
Tang, Bolun, Yunbo Shi, Jianwei Li, Jie Tang, and Qiaohua Feng.
2022. "Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors" Sensors 22, no. 18: 6778.
https://doi.org/10.3390/s22186778
APA Style
Tang, B., Shi, Y., Li, J., Tang, J., & Feng, Q.
(2022). Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors. Sensors, 22(18), 6778.
https://doi.org/10.3390/s22186778