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Journal: Sensors, 2022
Volume: 22
Number: 314

Article: True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor
Authors: by Jan Thiesler, Thomas Ahbe, Rainer Tutsch and Gaoliang Dai
Link: https://www.mdpi.com/1424-8220/22/1/314

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