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Journal: Sensors, 2021
Volume: 21
Number: 1396
Article:
Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process
Authors:
by
Zung-You Tsai, Po-Jen Shih, Yao-Chuan Tsai and Ching-Liang Dai
Link:
https://www.mdpi.com/1424-8220/21/4/1396
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