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Journal: Sensors, 2021
Volume: 21
Number: 1396

Article: Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process
Authors: by Zung-You Tsai, Po-Jen Shih, Yao-Chuan Tsai and Ching-Liang Dai
Link: https://www.mdpi.com/1424-8220/21/4/1396

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