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Journal: Sensors, 2020
Volume: 20
Number: 6159

Article: Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System
Authors: by Shao-Yu Chu, Meng-Xian Shen, Tsung-Han Yeh, Chia-Hsun Chen, Ching-Ting Lee and Hsin-Ying Lee
Link: https://www.mdpi.com/1424-8220/20/21/6159

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