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Journal: Sensors, 2020
Volume: 20
Number: 6159
Article:
Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System
Authors:
by
Shao-Yu Chu, Meng-Xian Shen, Tsung-Han Yeh, Chia-Hsun Chen, Ching-Ting Lee and Hsin-Ying Lee
Link:
https://www.mdpi.com/1424-8220/20/21/6159
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