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Journal: Sensors, 2020
Volume: 20
Number: 4630
Article:
Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications
Authors:
by
Florian Bartoli, Jérémy Streque, Jaafar Ghanbaja, Philippe Pigeat, Pascal Boulet, Sami Hage-Ali, Natalya Naumenko, A. Redjaïmia, Thierry Aubert and Omar Elmazria
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https://www.mdpi.com/1424-8220/20/16/4630
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