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Open AccessArticle

The Multisensor Array Based on Grown-On-Chip Zinc Oxide Nanorod Network for Selective Discrimination of Alcohol Vapors at Sub-ppm Range

1
Department of Micro- and Nanoelectronics, St. Petersburg Electrotechnical University “LETI”, 197022 St. Petersburg, Russia
2
Physico-Technical Institute, Yuri Gagarin State Technical University of Saratov, 77 Polytechnicheskaya str., 410054 Saratov, Russia
3
Skolkovo Institute of Science and Technology, Skolkovo Innovation Center, 3 Nobel str., 121205 Moscow, Russia
4
Institute for Applied Materials, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
5
Karlsruhe Nano Micro Facility, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
6
Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(19), 4265; https://doi.org/10.3390/s19194265
Received: 5 September 2019 / Revised: 27 September 2019 / Accepted: 29 September 2019 / Published: 1 October 2019
(This article belongs to the Special Issue Multisensor Arrays for Environmental Monitoring)
We discuss the fabrication of gas-analytical multisensor arrays based on ZnO nanorods grown via a hydrothermal route directly on a multielectrode chip. The protocol to deposit the nanorods over the chip includes the primary formation of ZnO nano-clusters over the surface and secondly the oxide hydrothermal growth in a solution that facilitates the appearance of ZnO nanorods in the high aspect ratio which comprise a network. We have tested the proof-of-concept prototype of the ZnO nanorod network-based chip heated up to 400 °C versus three alcohol vapors, ethanol, isopropanol and butanol, at approx. 0.2–5 ppm concentrations when mixed with dry air. The results indicate that the developed chip is highly sensitive to these analytes with a detection limit down to the sub-ppm range. Due to the pristine differences in ZnO nanorod network density the chip yields a vector signal which enables the discrimination of various alcohols at a reasonable degree via processing by linear discriminant analysis even at a sub-ppm concentration range suitable for practical applications. View Full-Text
Keywords: zinc oxide; nanorod; gas sensor; multisensor array; selectivity; sensitivity; ethanol; isopropanol; butanol zinc oxide; nanorod; gas sensor; multisensor array; selectivity; sensitivity; ethanol; isopropanol; butanol
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Bobkov, A.; Varezhnikov, A.; Plugin, I.; Fedorov, F.S.; Trouillet, V.; Geckle, U.; Sommer, M.; Goffman, V.; Moshnikov, V.; Sysoev, V. The Multisensor Array Based on Grown-On-Chip Zinc Oxide Nanorod Network for Selective Discrimination of Alcohol Vapors at Sub-ppm Range. Sensors 2019, 19, 4265.

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