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On-Chip Non-Dispersive Infrared CO2 Sensor Based on an Integrating Cylinder

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Photonics Research Group, INTEC, Ghent University-imec, Technologiepark 126, 9052 Gent, Belgium
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Center for Nano- and Biophotonics, Ghent University, 9000 Gent, Belgium
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Melexis Technologies NV, Transportstraat 1, 3980 Tessenderlo, Belgium
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Author to whom correspondence should be addressed.
This paper is an extended version of our paper published in: Jia, X.; Roelkens, G.; Baets, R.; Roels, J. A miniaturized non-dispersive infrared CO2 sensor based on a 2D integrating cylinder. Optical Sensors. In Proceedings of the Embedded Technologies Expo & Conference, San Jose, CA, USA, 25–27 June 2019.
Sensors 2019, 19(19), 4260; https://doi.org/10.3390/s19194260
Received: 14 August 2019 / Revised: 26 September 2019 / Accepted: 27 September 2019 / Published: 30 September 2019
(This article belongs to the Section Optical Sensors)
In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simulation with 3D ray tracing shows that an integrating cylinder with 4 mm diameter gives an equivalent optical path length of 3.5 cm. The sensor is fabricated using Deep Reactive Ion Etching (DRIE) and wafer bonding. The fabricated sensor was evaluated by performing a CO2 concentration measurement, showing a limit of detection of ∼100 ppm. The response time of the sensor is only ∼2.8 s, due to its small footprint. The use of DRIE-based waveguide structures enables mass fabrication, as well as the potential co-integration of flip-chip integrated midIR light-emitting diodes (LEDs) and photodetectors, resulting in a compact, low-power, and low-cost NDIR CO2 sensor. View Full-Text
Keywords: optical sensor; CO2 sensor; non-dispersive infrared (NDIR); silicon photonics optical sensor; CO2 sensor; non-dispersive infrared (NDIR); silicon photonics
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Jia, X.; Roels, J.; Baets, R.; Roelkens, G. On-Chip Non-Dispersive Infrared CO2 Sensor Based on an Integrating Cylinder . Sensors 2019, 19, 4260.

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