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Article

Testing of a MEMS Dynamic Inclinometer Using the Stewart Platform

1
Division of Mechanics and Acoustics, National Institute of Metrology of China, Beijing 100029, China
2
College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(19), 4233; https://doi.org/10.3390/s19194233
Received: 2 September 2019 / Revised: 21 September 2019 / Accepted: 24 September 2019 / Published: 29 September 2019
(This article belongs to the Special Issue Sensors for Biomechanics Application)
The micro-electro-mechanical system (MEMS) dynamic inclinometer integrates a tri-axis gyroscope and a tri-axis accelerometer for real-time tilt measurement. The Stewart platform has the ability to generate six degrees of freedom of spatial orbits. The method of applying spatial orbits to the testing of MEMS inclinometers is investigated. Inverse and forward kinematics are analyzed for controlling and measuring the position and orientation of the Stewart platform. The Stewart platform is controlled to generate a conical motion, based on which the sensitivities of the gyroscope, accelerometer, and tilt sensing are determined. Spatial positional orbits are also generated in order to obtain the tilt angles caused by the cross-coupling influence. The experiment is conducted to show that the tested amplitude frequency deviations of the gyroscope and tilt sensing sensitivities between the Stewart platform and the traditional rotator are less than 0.2 dB and 0.1 dB, respectively. View Full-Text
Keywords: MEMS inclinometer; dynamic performance; spatial orbit; Stewart platform MEMS inclinometer; dynamic performance; spatial orbit; Stewart platform
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MDPI and ACS Style

Liu, Z.; Cai, C.; Yang, M.; Zhang, Y. Testing of a MEMS Dynamic Inclinometer Using the Stewart Platform. Sensors 2019, 19, 4233. https://doi.org/10.3390/s19194233

AMA Style

Liu Z, Cai C, Yang M, Zhang Y. Testing of a MEMS Dynamic Inclinometer Using the Stewart Platform. Sensors. 2019; 19(19):4233. https://doi.org/10.3390/s19194233

Chicago/Turabian Style

Liu, Zhihua, Chenguang Cai, Ming Yang, and Ying Zhang. 2019. "Testing of a MEMS Dynamic Inclinometer Using the Stewart Platform" Sensors 19, no. 19: 4233. https://doi.org/10.3390/s19194233

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