An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages
1
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116023, China
2
School of Mechanical Engineering, the University of Adelaide, Adelaide, SA 5005, Australia
3
Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(13), 2855; https://doi.org/10.3390/s19132855
Received: 17 May 2019
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Revised: 20 June 2019
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Accepted: 21 June 2019
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Published: 27 June 2019
(This article belongs to the Section Optical Sensors)
The geometric error motions of rotary stages greatly affect the accuracy of constructed machines such as machine tools, measuring instruments, and robots. In this paper, an embedded sensor system for real-time measurement of two radial and three angular error motions of a rotary stage is proposed, which makes use of a rotary encoder with multiple scanning heads to measure the rotational angle and two radial error motions and a miniature autocollimator to measure two tilt angular errors of the axis of rotation. The assembly errors of the grid disc of the encoder and the mirror for autocollimator are also evaluated and compensated. The developed measuring device can be fixed inside the rotary stage. In the experiments, radial error motions of two points on the axis (h = 5 mm and 60 mm) were measured and calibrated with LVDTs, and the data showed that the radial error motions of the axis were less than 20 μm, and the calibration residual errors were less than 2 μm. When intermittent external forces were applied to the stage, the change of the stage’s error motion could also be monitored accurately.
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Keywords:
radial error; tilt error; rotary stage; real-time measurement
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MDPI and ACS Style
Lou, Z.-F.; Hao, X.-P.; Cai, Y.-D.; Lu, T.-F.; Wang, X.-D.; Fan, K.-C. An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages. Sensors 2019, 19, 2855. https://doi.org/10.3390/s19132855
AMA Style
Lou Z-F, Hao X-P, Cai Y-D, Lu T-F, Wang X-D, Fan K-C. An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages. Sensors. 2019; 19(13):2855. https://doi.org/10.3390/s19132855
Chicago/Turabian StyleLou, Zhi-Feng, Xiu-Peng Hao, Yin-Di Cai, Tien-Fu Lu, Xiao-Dong Wang, and Kuang-Chao Fan. 2019. "An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages" Sensors 19, no. 13: 2855. https://doi.org/10.3390/s19132855
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