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Journal: Sensors, 2019
Volume: 19
Number: 2855
Article:
An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages
Authors:
by
Zhi-Feng Lou, Xiu-Peng Hao, Yin-Di Cai, Tien-Fu Lu, Xiao-Dong Wang and Kuang-Chao Fan
Link:
https://www.mdpi.com/1424-8220/19/13/2855
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