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Open AccessArticle

Design of a Measurement System for Six-Degree-of-Freedom Geometric Errors of a Linear Guide of a Machine Tool

by 1,2,*, 2,3 and 2,3
1
Department of Mechanical Engineering, National Cheng Kung University, Tainan City 70101, Taiwan
2
Department of Mechanical Engineering, National Chung Cheng University, Chiayi County 62102, Taiwan
3
Advanced Institute of Manufacturing with High-tech Innovations, National Chung Cheng University, Chiayi County 62102, Taiwan
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(1), 5; https://doi.org/10.3390/s19010005
Received: 27 November 2018 / Revised: 11 December 2018 / Accepted: 17 December 2018 / Published: 20 December 2018
(This article belongs to the Special Issue Selected Papers from IEEE ICKII 2018)
This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool’s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab’s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error’s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool’s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are ±0.5 arcsec, ±3.6 arcsec, ±2.1 μm, and ±2.3 μm, respectively. The maximum repeatability deviations for the measured guide’s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 μm, 0.3 μm, and 3 μm, respectively. View Full-Text
Keywords: geometric errors; skew-ray tracing; multiple-degree-of-freedom measurement; machine tool; position; straightness; pitch; roll; yaw; crosstalk geometric errors; skew-ray tracing; multiple-degree-of-freedom measurement; machine tool; position; straightness; pitch; roll; yaw; crosstalk
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MDPI and ACS Style

Liu, C.-S.; Lai, J.-J.; Luo, Y.-T. Design of a Measurement System for Six-Degree-of-Freedom Geometric Errors of a Linear Guide of a Machine Tool. Sensors 2019, 19, 5. https://doi.org/10.3390/s19010005

AMA Style

Liu C-S, Lai J-J, Luo Y-T. Design of a Measurement System for Six-Degree-of-Freedom Geometric Errors of a Linear Guide of a Machine Tool. Sensors. 2019; 19(1):5. https://doi.org/10.3390/s19010005

Chicago/Turabian Style

Liu, Chien-Sheng; Lai, Jia-Jun; Luo, Yong-Tai. 2019. "Design of a Measurement System for Six-Degree-of-Freedom Geometric Errors of a Linear Guide of a Machine Tool" Sensors 19, no. 1: 5. https://doi.org/10.3390/s19010005

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