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Sensors 2019, 19(1), 188; https://doi.org/10.3390/s19010188

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

1,2, 1,2,*, 1,*, 1, 1,2, 1,2 and 1,2
1
Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China
*
Authors to whom correspondence should be addressed.
Received: 27 November 2018 / Revised: 22 December 2018 / Accepted: 2 January 2019 / Published: 7 January 2019
(This article belongs to the Section Physical Sensors)
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PDF [5199 KB, uploaded 7 January 2019]
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Abstract

Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance. View Full-Text
Keywords: highly sensitive; low power consumption; diode; micro-Pirani vacuum sensor highly sensitive; low power consumption; diode; micro-Pirani vacuum sensor
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Wei, D.; Fu, J.; Liu, R.; Hou, Y.; Liu, C.; Wang, W.; Chen, D. Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption. Sensors 2019, 19, 188.

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