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Journal: Sensors, 2018
Volume: 18
Number: 2603
Article:
Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures
Authors:
by
Zhiyong Chen, Meifeng Guo, Rong Zhang, Bin Zhou and Qi Wei
Link:
https://www.mdpi.com/1424-8220/18/8/2603
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