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Open AccessArticle

Optimal Design of Electromagnetically Actuated MEMS Cantilevers

1
Department of Electrical, Computer and Biomedical Engineering, University of Pavia, I-27100 Pavia, Italy
2
Faculty of Microsystem, Electronics and Photonics, Wrocław University of Science and Technology, PL-50372 Wrocław, Poland
3
Institute of Mechatronics and Information Systems, Łódź University of Technology, PL-90924 Łódź, Poland
4
Institute of Electron Technology, PL-02668 Warsaw, Poland
*
Author to whom correspondence should be addressed.
Sensors 2018, 18(8), 2533; https://doi.org/10.3390/s18082533
Received: 29 June 2018 / Revised: 26 July 2018 / Accepted: 30 July 2018 / Published: 2 August 2018
(This article belongs to the Special Issue Small Devices and the High-Tech Society)
In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed cantilevers are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach. View Full-Text
Keywords: electromagnetically actuated cantilevers; nanometrology; multiobjective optimization; active cantilevers; SOI-based prototyping electromagnetically actuated cantilevers; nanometrology; multiobjective optimization; active cantilevers; SOI-based prototyping
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MDPI and ACS Style

Di Barba, P.; Gotszalk, T.; Majstrzyk, W.; Mognaschi, M.E.; Orłowska, K.; Wiak, S.; Sierakowski, A. Optimal Design of Electromagnetically Actuated MEMS Cantilevers. Sensors 2018, 18, 2533.

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