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Du Y-J, Yang T-T, Gong D-D, Wang Y-C, Sun X-Y, Qin F, Dai G. High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors. Sensors. 2018; 18(7):2055. https://doi.org/10.3390/s18072055

Du, Yi-Jia, Ting-Ting Yang, Dong-Dong Gong, Yi-Cheng Wang, Xiang-Yu Sun, Feng Qin, and Gang Dai. 2018. "High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors" Sensors 18, no. 7: 2055. https://doi.org/10.3390/s18072055

Du, Y.-J., Yang, T.-T., Gong, D.-D., Wang, Y.-C., Sun, X.-Y., Qin, F., & Dai, G. (2018). High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors. Sensors, 18(7), 2055. https://doi.org/10.3390/s18072055