Order Article Reprints

Zhao B, Shi W, Zhang J, Zhang M, Qi X, Li J, Li F, Tan J. Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors. Sensors. 2018; 18(7):2030. https://doi.org/10.3390/s18072030

Zhao, Bo, Weijia Shi, Jiawei Zhang, Ming Zhang, Xue Qi, Jiaxin Li, Feng Li, and Jiubin Tan. 2018. "Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors" Sensors 18, no. 7: 2030. https://doi.org/10.3390/s18072030

Zhao, B., Shi, W., Zhang, J., Zhang, M., Qi, X., Li, J., Li, F., & Tan, J. (2018). Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors. Sensors, 18(7), 2030. https://doi.org/10.3390/s18072030