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Journal: Sensors, 2018
Volume: 18
Number: 1240
Article:
Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application
Authors:
by
Zhibo Ma, Yinan Wang, Qiang Shen, Han Zhang and Xuetao Guo
Link:
https://www.mdpi.com/1424-8220/18/4/1240
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