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Sensors 2018, 18(2), 618; https://doi.org/10.3390/s18020618

Using Micro-Molding and Stamping to Fabricate Conductive Polydimethylsiloxane-Based Flexible High-Sensitivity Strain Gauges

Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan
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Received: 19 January 2018 / Revised: 12 February 2018 / Accepted: 16 February 2018 / Published: 18 February 2018
(This article belongs to the Section Biosensors)
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Abstract

In this study, polydimethylsiloxane (PDMS) and conductive carbon nanoparticles were combined to fabricate a conductive elastomer PDMS (CPDMS). A high sensitive and flexible CPDMS strain sensor is fabricated by using stamping-process based micro patterning. Compared with conventional sensors, flexible strain sensors are more suitable for medical applications but are usually fabricated by photolithography, which suffers from a large number of steps and difficult mass production. Hence, we fabricated flexible strain sensors using a stamping-process with fewer processes than photolithography. The piezoresistive coefficient and sensitivity of the flexible strain sensor were improved by sensor pattern design and thickness change. Micro-patterning is used to fabricate various CPDMS microstructure patterns. The effect of gauge pattern was evaluated with ANSYS simulations. The piezoresistance of the strain gauges was measured and the gauge factor determined. Experimental results show that the piezoresistive coefficient of CPDMS is approximately linear. Gauge factor measurement results show that the gauge factor of a 140.0 μm thick strain gauge with five grids is the highest. View Full-Text
Keywords: conductive PDMS; strain gauge; carbon particle; stamping-process; gauge factor; piezoresistance conductive PDMS; strain gauge; carbon particle; stamping-process; gauge factor; piezoresistance
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Han, C.-J.; Chiang, H.-P.; Cheng, Y.-C. Using Micro-Molding and Stamping to Fabricate Conductive Polydimethylsiloxane-Based Flexible High-Sensitivity Strain Gauges. Sensors 2018, 18, 618.

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