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Sensors 2018, 18(2), 346;

A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 to 360

State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710054, China
This paper is an extended version of our paper published in Wang, S.; Ren, J.; Zhang, T.; Weng, Y.; Jiang, Z.; Wei, X. A MEMS Resonant Tilt Sensor with High Sensitivity Maintained in the Whole 360◦ Measurement Range. In Proceedings of the 2016 IEEE on SENSORS, Orlando, FL, USA, 30 October–3 November 2016; pp. 1159–1161.
Author to whom correspondence should be addressed.
Received: 16 November 2017 / Revised: 18 January 2018 / Accepted: 19 January 2018 / Published: 25 January 2018
(This article belongs to the Special Issue Smart Sensors for Mechatronic and Robotic Systems)
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In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002 in the whole measurement range from 0 to 360 . View Full-Text
Keywords: double-ended tuning fork; MEMS; oscillator; resonator; tilt sensor double-ended tuning fork; MEMS; oscillator; resonator; tilt sensor

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Wang, S.; Wei, X.; Weng, Y.; Zhao, Y.; Jiang, Z. A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0 to 360. Sensors 2018, 18, 346.

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