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Journal: Sensors, 2018
Volume: 18
Number: 3842

Article: Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
Authors: by Martin Fischeneder, Martin Oposich, Michael Schneider and Ulrich Schmid
Link: https://www.mdpi.com/1424-8220/18/11/3842

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