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Journal: Sensors, 2018
Volume: 18
Number: 3545

Article: Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications
Authors: by Néstor N. Peña-García, Luz A. Aguilera-Cortés, Max A. González-Palacios, Jean-Pierre Raskin and Agustín L. Herrera-May
Link: https://www.mdpi.com/1424-8220/18/10/3545

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