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Journal: Sensors, 2018
Volume: 18
Number: 138
Article:
Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection
Authors:
by
Satoshi Maruyama, Takeshi Hizawa, Kazuhiro Takahashi and Kazuaki Sawada
Link:
https://www.mdpi.com/1424-8220/18/1/138
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