The injection and ionization of volatile organic compounds (VOA) by an integrated chip is experimentally analyzed in this paper. The integrated chip consists of a needle-to-cylinder electrode mounting on the Polymethyl Methacrylate (PMMA) substrate. The needle-to-cylinder electrode is designed and fabricated by Lithographie, Galvanoformung and Abformung (LIGA) technology. In this paper, the needle is connected to a negative power supply of −5 kV and used as the cathode; the cylinder electrodes are composed of two arrays of cylinders and serve as the anode. The ionic wind is produced based on corona and glow discharges of needle-to-cylinder electrodes. The experimental setup is designed to observe the properties of the needle-to-cylinder discharge and prove its functions as an ion source and air pump. In summary, the main results are as follows: (1) the ionic wind velocity produced by the chip is about 0.79 m/s at an applied voltage of −3300 V; (2) acetic acid and ammonia water can be injected through the chip, which is proved by pH test paper; and (3) the current measured by a Faraday cup is about 10 pA for acetic acid and ammonia with an applied voltage of −3185 V. The integrated chip is promising for portable analytical instruments, such as ion mobility spectrometry (IMS), field asymmetric ion mobility spectrometry (FAIMS), and mass spectrometry (MS).
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