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Journal: Sensors, 2017
Volume: 17
Number: 2561

Article: A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams
Authors: by Lili Gao, Zai-Fa Zhou and Qing-An Huang
Link: https://www.mdpi.com/1424-8220/17/11/2561

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