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Sensors 2017, 17(10), 2264;

A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration

College of Mechatronics Engineering and Automation, National University of DefenseTechnology, Changsha 410073, China
Authors to whom correspondence should be addressed.
Received: 28 August 2017 / Revised: 27 September 2017 / Accepted: 27 September 2017 / Published: 2 October 2017
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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This paper reports the design and simulation of a 4 mm2 double differential torsional MEMS accelerometer based on a double-beam configuration. Based on the structure of conventional torsional accelerometers, normally composed of one pair of proof masses and one torsional beam, this work explores the double differential configuration: a torsional accelerometer with two pairs of unbalanced proof masses rotating in reverse. Also, the torsional beam is designed as a double-beam structure, which is a symmetrical structure formed by two torsional beams separated by a certain distance. The device area of the novel accelerometer is more than 50 times smaller than that of a traditional double differential torsional MEMS accelerometer. The FEM simulation results demonstrate that the smaller device does not sacrifice other specifications, such as mechanical sensitivity, nonlinearity and temperature robustness. The mechanical sensitivity and nonlinearity of a ±15 g measuring range is 59.4 fF/g and 0.88%, respectively. Compared with traditional single-beam silicon structures, the novel structure can achieve lower maximum principle stress in critical regions and reduce the possibility of failure when high-g acceleration loading is applied along all three axes. The mechanical noise equivalent acceleration is about 0.13 mg / Hz in the theoretical calculations and the offset temperature coefficient is 0.25 mg/ in the full temperature range of 40 to 60 . View Full-Text
Keywords: double differential; torsional; MEMS; accelerometer; double-beam; temperature robustness double differential; torsional; MEMS; accelerometer; double-beam; temperature robustness

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Miao, T.; Xiao, D.; Li, Q.; Hou, Z.; Wu, X. A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration. Sensors 2017, 17, 2264.

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