Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

Azcona, Francisco J.; Jha, Ajit; Yáñez, Carlos; Atashkhooei, Reza; Royo, Santiago

doi:10.3390/s16070997

Open AccessArticle

Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

by

Francisco J. Azcona

^*,

Ajit Jha

,

Carlos Yáñez

,

Reza Atashkhooei

and

Santiago Royo

Centre for Sensors, Instruments and Systems Development (CD6)-UPC BarcelonaTech, Rambla St. Nebridi 10, Terrassa E-08222, Spain

^*

Author to whom correspondence should be addressed.

Sensors 2016, 16(7), 997; https://doi.org/10.3390/s16070997

Submission received: 28 April 2016 / Revised: 23 June 2016 / Accepted: 24 June 2016 / Published: 29 June 2016

(This article belongs to the Special Issue SPR, WGM & Nano-Sensors: Advantages and Prospects)

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Abstract

Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper, a new approach to measure microcantilever motion with nanometric resolution is presented. The proposed approach is based on the concept of mechanically-modulated optical feedback interferometry, a technique that has shown displacement measurement capabilities well within the nanometric scale and that, due to its size, compactness and low cost, may be a suitable choice for measuring nanometric motions in cantilever-like sensors. It will be shown that the sensor, in its current state of development, is capable of following a cantilever sinusoidal trajectory at different sets of frequencies ranging up to 200 Hz and peak to peak amplitudes up to

λ / 2

with experimental resolutions in the

λ / 100

range.

Keywords: optical feedback interferometry; displacement measurement; nanometric resolution; atomic force microscopy

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MDPI and ACS Style

Azcona, F.J.; Jha, A.; Yáñez, C.; Atashkhooei, R.; Royo, S. Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer. Sensors 2016, 16, 997. https://doi.org/10.3390/s16070997

AMA Style

Azcona FJ, Jha A, Yáñez C, Atashkhooei R, Royo S. Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer. Sensors. 2016; 16(7):997. https://doi.org/10.3390/s16070997

Chicago/Turabian Style

Azcona, Francisco J., Ajit Jha, Carlos Yáñez, Reza Atashkhooei, and Santiago Royo. 2016. "Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer" Sensors 16, no. 7: 997. https://doi.org/10.3390/s16070997

APA Style

Azcona, F. J., Jha, A., Yáñez, C., Atashkhooei, R., & Royo, S. (2016). Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer. Sensors, 16(7), 997. https://doi.org/10.3390/s16070997

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

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Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

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