Next Article in Journal
Diurnal Variability in Chlorophyll-a, Carotenoids, CDOM and SO42− Intensity of Offshore Seawater Detected by an Underwater Fluorescence-Raman Spectral System
Next Article in Special Issue
A Wideband Circularly Polarized Pixelated Dielectric Resonator Antenna
Previous Article in Journal
Improved Fuzzy Logic System to Evaluate Milk Electrical Conductivity Signals from On-Line Sensors to Monitor Dairy Goat Mastitis
Previous Article in Special Issue
High-Precision Hysteresis Sensing of the Quartz Crystal Inductance-to-Frequency Converter
Article Menu

Export Article

Open AccessArticle
Sensors 2016, 16(7), 1080;

Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings

Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB T6G 1H9, Canada
Nanofab, University of Alberta, Edmonton, AB T6G 1H9, Canada
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 2 May 2016 / Revised: 5 July 2016 / Accepted: 8 July 2016 / Published: 13 July 2016
(This article belongs to the Special Issue Resonator Sensors)
Full-Text   |   PDF [2515 KB, uploaded 13 July 2016]   |  


Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabrication modification of nanostrings machined from an amorphous SiCN material. The modification consisted of milling linear arrays of holes along the length of nanostrings. This milling results in a slight decrease of resonant frequency while increasing the surface to volume ratio of the device. The frequency decrease is attributed to a reduction of the effective Young’s modulus of the string, which in turn reduces the tension the string is under. Such experimental observations are supported by the finite element analysis of milled and non-milled strings. View Full-Text
Keywords: helium ion; milling; nanostrings; resonators; nanoelectromechanical systems helium ion; milling; nanostrings; resonators; nanoelectromechanical systems

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Zheng, W.; Li, P.; van den Hurk, R.; Evoy, S. Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings. Sensors 2016, 16, 1080.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top